|
ABM Mask Aligner
|
Tool usage |
36.00/hr (9.00 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 36.00/hr (9.00 minimum)
|
|
AG Heatpulse 610 RTA A
|
Tool usage |
48.00/hr (24.00 minimum)
| 125.00/hr (62.50 minimum)
| 125.00/hr (62.50 minimum)
| 250.00/hr (125.00 minimum)
| 48.00/hr (24.00 minimum)
|
|
AJA Ion Mill
|
Tool usage |
37.00/hr (18.50 minimum)
| 123.00/hr (61.50 minimum)
| 123.00/hr (61.50 minimum)
| 235.00/hr (117.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
AJA-Q
|
Tool usage |
77.00/hr (57.75 minimum)
| 306.00/hr (229.50 minimum)
| 306.00/hr (229.50 minimum)
| 584.00/hr (438.00 minimum)
| 77.00/hr (57.75 minimum)
|
|
AJA-Q2
|
Tool usage |
77.00/hr (38.50 minimum)
| 306.00/hr (153.00 minimum)
| 306.00/hr (153.00 minimum)
| 584.00/hr (292.00 minimum)
| 77.00/hr (38.50 minimum)
|
|
AJA-Q Oxidation
|
Tool usage |
39.00/hr (29.25 minimum)
| 153.00/hr (114.75 minimum)
| 153.00/hr (114.75 minimum)
| 292.00/hr (219.00 minimum)
| 39.00/hr (29.25 minimum)
|
|
AJA Sputter 1
|
Tool usage |
53.00/hr (26.50 minimum)
| 161.00/hr (80.50 minimum)
| 161.00/hr (80.50 minimum)
| 308.00/hr (154.00 minimum)
| 53.00/hr (26.50 minimum)
|
|
AJA Sputter 2
|
Tool usage |
53.00/hr (26.50 minimum)
| 161.00/hr (80.50 minimum)
| 161.00/hr (80.50 minimum)
| 308.00/hr (154.00 minimum)
| 53.00/hr (26.50 minimum)
|
|
AJA Sputter 3
|
Tool usage |
53.00/hr (26.50 minimum)
| 161.00/hr (80.50 minimum)
| 161.00/hr (80.50 minimum)
| 308.00/hr (154.00 minimum)
| 53.00/hr (26.50 minimum)
|
|
AMST MVD100
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
Anatech Resist Strip
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
Angstrom E-Beam Evaporator
|
Tool usage |
55.00/hr (41.25 minimum)
| 184.00/hr (138.00 minimum)
| 184.00/hr (138.00 minimum)
| 352.00/hr (264.00 minimum)
| 55.00/hr (41.25 minimum)
|
|
Angstrom-Q
|
Tool usage |
77.00/hr (57.75 minimum)
| 306.00/hr (229.50 minimum)
| 306.00/hr (229.50 minimum)
| 584.00/hr (438.00 minimum)
| 77.00/hr (57.75 minimum)
|
|
Angstrom-Q Oxidation
|
Tool usage |
39.00/hr (29.25 minimum)
| 153.00/hr (114.75 minimum)
| 153.00/hr (114.75 minimum)
| 292.00/hr (219.00 minimum)
| 39.00/hr (29.25 minimum)
|
|
Arradiance GEMStar ALD
|
Tool usage |
62.00/hr (62.00 minimum)
| 266.00/hr (266.00 minimum)
| 266.00/hr (266.00 minimum)
| 507.00/hr (507.00 minimum)
| 62.00/hr (62.00 minimum)
|
|
ASML DUV Stepper
|
Tool usage |
116.00/hr (58.00 minimum)
| 398.00/hr (199.00 minimum)
| 398.00/hr (199.00 minimum)
| 761.00/hr (380.50 minimum)
| 116.00/hr (58.00 minimum)
|
|
Bruker DektakXT Profilometer
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Bruker Energy-dispersive X-ray Spectrometer (EDS)
|
Tool usage |
14.00/hr (14.00 minimum)
| 35.00/hr (35.00 minimum)
| 35.00/hr (35.00 minimum)
| 66.00/hr (66.00 minimum)
| 14.00/hr (14.00 minimum)
|
|
CHA Mark 50 E-beam Evaporator
|
Tool usage |
55.00/hr (55.00 minimum)
| 184.00/hr (184.00 minimum)
| 184.00/hr (184.00 minimum)
| 352.00/hr (352.00 minimum)
| 55.00/hr (55.00 minimum)
|
|
CHA Thermal Evaporator
|
Tool usage |
37.00/hr (55.50 minimum)
| 122.00/hr (183.00 minimum)
| 122.00/hr (183.00 minimum)
| 233.00/hr (349.50 minimum)
| 37.00/hr (55.50 minimum)
|
|
CorSolutions Microfluidic Probe Station
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
DC Probe Station and Electronics
|
Tool usage |
40.00/hr (40.00 minimum)
| 130.00/hr (130.00 minimum)
| 130.00/hr (130.00 minimum)
| 260.00/hr (260.00 minimum)
| 40.00/hr (40.00 minimum)
|
|
Dektak 6M Profilometer
|
Tool usage |
22.00/hr (2.20 minimum)
| 61.00/hr (6.10 minimum)
| 61.00/hr (6.10 minimum)
| 118.00/hr (11.80 minimum)
| 22.00/hr (2.20 minimum)
|
|
DISCO Dicing Saw
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
Filmetrics R50
|
Tool usage |
23.00/hr (5.75 minimum)
| 67.00/hr (16.75 minimum)
| 67.00/hr (16.75 minimum)
| 129.00/hr (32.25 minimum)
| 23.00/hr (5.75 minimum)
|
|
FleXus Film Stress Measurement
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
GCA 5X g-line Stepper
|
Tool usage |
66.00/hr (33.00 minimum)
| 230.00/hr (115.00 minimum)
| 230.00/hr (115.00 minimum)
| 440.00/hr (220.00 minimum)
| 66.00/hr (33.00 minimum)
|
|
GCA AS200 i-line Stepper
|
Tool usage |
77.00/hr (38.50 minimum)
| 306.00/hr (153.00 minimum)
| 306.00/hr (153.00 minimum)
| 584.00/hr (292.00 minimum)
| 77.00/hr (38.50 minimum)
|
|
Glen 1000 Resist Strip
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
Hamatech Hot Piranha
|
Tool usage |
28.00/hr (7.00 minimum)
| 67.00/hr (16.75 minimum)
| 67.00/hr (16.75 minimum)
| 128.00/hr (32.00 minimum)
| 28.00/hr (7.00 minimum)
|
|
Heidelberg DWL2000
|
Tool usage |
116.00/hr (58.00 minimum)
| 398.00/hr (199.00 minimum)
| 398.00/hr (199.00 minimum)
| 761.00/hr (380.50 minimum)
| 116.00/hr (58.00 minimum)
|
|
Heidelberg MLA 150 Maskless Aligner
|
Tool usage |
66.00/hr (33.00 minimum)
| 230.00/hr (115.00 minimum)
| 230.00/hr (115.00 minimum)
| 440.00/hr (220.00 minimum)
| 66.00/hr (33.00 minimum)
|
|
Hitachi TM1000 SEM
|
Tool usage |
14.00/hr (3.50 minimum)
| 35.00/hr (8.75 minimum)
| 35.00/hr (8.75 minimum)
| 66.00/hr (16.50 minimum)
| 14.00/hr (3.50 minimum)
|
|
Hitachi TM3000 SEM
|
Tool usage |
14.00/hr (3.50 minimum)
| 35.00/hr (8.75 minimum)
| 35.00/hr (8.75 minimum)
| 66.00/hr (16.50 minimum)
| 14.00/hr (3.50 minimum)
|
|
Hot Press
|
Tool usage |
22.00/hr (22.00 minimum)
| 61.00/hr (61.00 minimum)
| 61.00/hr (61.00 minimum)
| 118.00/hr (118.00 minimum)
| 22.00/hr (22.00 minimum)
|
|
JEOL JBX-6300FS E-beam Lithography System
|
Tool usage |
115.00/hr (115.00 minimum)
| 375.00/hr (375.00 minimum)
| 375.00/hr (375.00 minimum)
| 750.00/hr (750.00 minimum)
| 115.00/hr (115.00 minimum)
|
|
JEOL JBX-9500FS E-beam Lithography System
|
Tool usage |
230.00/hr (230.00 minimum)
| 750.00/hr (750.00 minimum)
| 750.00/hr (750.00 minimum)
| 1500.00/hr (1500.00 minimum)
| 230.00/hr (230.00 minimum)
|
|
Keyence VHX-7100 Digital Microscope
|
Tool usage |
8.00/hr (2.00 minimum)
| 23.00/hr (5.75 minimum)
| 23.00/hr (5.75 minimum)
| 44.00/hr (11.00 minimum)
| 8.00/hr (2.00 minimum)
|
|
KLA P7 Profilometer
|
Tool usage |
22.00/hr (2.20 minimum)
| 61.00/hr (6.10 minimum)
| 61.00/hr (6.10 minimum)
| 118.00/hr (11.80 minimum)
| 22.00/hr (2.20 minimum)
|
|
K&S 4522 Gold Ball Bonder
|
Tool usage |
21.00/hr (5.25 minimum)
| 57.00/hr (14.25 minimum)
| 57.00/hr (14.25 minimum)
| 109.00/hr (27.25 minimum)
| 21.00/hr (5.25 minimum)
|
|
Leica 300 CPD
|
Tool usage |
22.00/hr (22.00 minimum)
| 61.00/hr (61.00 minimum)
| 61.00/hr (61.00 minimum)
| 118.00/hr (118.00 minimum)
| 22.00/hr (22.00 minimum)
|
|
Lesker PVD75 Sputter
|
Tool usage |
37.00/hr (37.00 minimum)
| 122.00/hr (122.00 minimum)
| 122.00/hr (122.00 minimum)
| 233.00/hr (233.00 minimum)
| 37.00/hr (37.00 minimum)
|
|
Logitech Orbis CMP
|
Tool usage |
37.00/hr (37.00 minimum)
| 122.00/hr (122.00 minimum)
| 122.00/hr (122.00 minimum)
| 233.00/hr (233.00 minimum)
| 37.00/hr (37.00 minimum)
|
|
Malvern Nano ZS Zetasizer
|
Tool usage |
48.00/hr (24.00 minimum)
| 78.00/hr (39.00 minimum)
| 78.00/hr (39.00 minimum)
| 150.00/hr (75.00 minimum)
| 48.00/hr (24.00 minimum)
|
|
Malvern NS300 NanoSight
|
Tool usage |
48.00/hr (24.00 minimum)
| 78.00/hr (39.00 minimum)
| 78.00/hr (39.00 minimum)
| 150.00/hr (75.00 minimum)
| 48.00/hr (24.00 minimum)
|
|
Metricon 2010|M Prism Coupler
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Microdrill
|
Tool usage |
14.00/hr (14.00 minimum)
| 35.00/hr (35.00 minimum)
| 35.00/hr (35.00 minimum)
| 66.00/hr (66.00 minimum)
| 14.00/hr (14.00 minimum)
|
|
Microwave Small-Signal Probe Station and Electronics
|
Tool usage |
75.00/hr (75.00 minimum)
| 250.00/hr (250.00 minimum)
| 250.00/hr (250.00 minimum)
| 500.00/hr (500.00 minimum)
| 75.00/hr (75.00 minimum)
|
|
MRL A1 General Anneal
|
Tool usage |
53.00/hr (53.00 minimum)
| 161.00/hr (161.00 minimum)
| 161.00/hr (161.00 minimum)
| 308.00/hr (308.00 minimum)
| 53.00/hr (53.00 minimum)
|
|
MRL A2 POCL3
|
Tool usage |
89.00/hr (133.50 minimum)
| 230.00/hr (345.00 minimum)
| 230.00/hr (345.00 minimum)
| 440.00/hr (660.00 minimum)
| 89.00/hr (133.50 minimum)
|
|
MRL A3 GaN Silicon Nitride
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL A4 LPCVD Silicon Carbide
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL B1 MOS Clean Anneal 2
|
Tool usage |
53.00/hr (53.00 minimum)
| 161.00/hr (161.00 minimum)
| 161.00/hr (161.00 minimum)
| 308.00/hr (308.00 minimum)
| 53.00/hr (53.00 minimum)
|
|
MRL B2 MOS Wet Oxide
|
Tool usage |
89.00/hr (89.00 minimum)
| 230.00/hr (230.00 minimum)
| 230.00/hr (230.00 minimum)
| 440.00/hr (440.00 minimum)
| 89.00/hr (89.00 minimum)
|
|
MRL B3 LPCVD LTO
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL B4 LPCVD Nitride
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL C1 Metal Anneal 3
|
Tool usage |
53.00/hr (53.00 minimum)
| 161.00/hr (161.00 minimum)
| 161.00/hr (161.00 minimum)
| 308.00/hr (308.00 minimum)
| 53.00/hr (53.00 minimum)
|
|
MRL C2 Metal Anneal 4
|
Tool usage |
53.00/hr (53.00 minimum)
| 161.00/hr (161.00 minimum)
| 161.00/hr (161.00 minimum)
| 308.00/hr (308.00 minimum)
| 53.00/hr (53.00 minimum)
|
|
MRL C4 LPCVD N+|P+ Poly
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL D1 SDS Boron Doping
|
Tool usage |
89.00/hr (133.50 minimum)
| 230.00/hr (345.00 minimum)
| 230.00/hr (345.00 minimum)
| 440.00/hr (660.00 minimum)
| 89.00/hr (133.50 minimum)
|
|
MRL D2 SDS Phosphorus Doping
|
Tool usage |
89.00/hr (133.50 minimum)
| 230.00/hr (345.00 minimum)
| 230.00/hr (345.00 minimum)
| 440.00/hr (660.00 minimum)
| 89.00/hr (133.50 minimum)
|
|
MRL D3 LPCVD CMOS N+ Poly
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL E1 CMOS Gate Oxide
|
Tool usage |
53.00/hr (53.00 minimum)
| 161.00/hr (161.00 minimum)
| 161.00/hr (161.00 minimum)
| 308.00/hr (308.00 minimum)
| 53.00/hr (53.00 minimum)
|
|
MRL E2 CMOS Wet Oxide
|
Tool usage |
89.00/hr (89.00 minimum)
| 230.00/hr (230.00 minimum)
| 230.00/hr (230.00 minimum)
| 440.00/hr (440.00 minimum)
| 89.00/hr (89.00 minimum)
|
|
MRL E3 LPCVD CMOS Undoped Poly
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
MRL E4 LPCVD CMOS Nitride
|
Tool usage |
98.00/hr (147.00 minimum)
| 299.00/hr (448.50 minimum)
| 299.00/hr (448.50 minimum)
| 572.00/hr (858.00 minimum)
| 98.00/hr (147.00 minimum)
|
|
Nabity NPGS Nanometer Pattern Generator System
|
Tool usage |
14.00/hr (7.00 minimum)
| 35.00/hr (17.50 minimum)
| 35.00/hr (17.50 minimum)
| 66.00/hr (33.00 minimum)
| 14.00/hr (7.00 minimum)
|
|
Nanoimprint NX-2500
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
Nanoscribe GT2 Two-Photon Lithography System
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Objet30 Pro 3D Printer
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
OEM M1 AlN Sputter
|
Tool usage |
53.00/hr (53.00 minimum)
| 161.00/hr (161.00 minimum)
| 161.00/hr (161.00 minimum)
| 308.00/hr (308.00 minimum)
| 53.00/hr (53.00 minimum)
|
|
Olympus BX-51 Fluorescence Microscope (2nd Floor)
|
Tool usage |
14.00/hr (3.50 minimum)
| 35.00/hr (8.75 minimum)
| 35.00/hr (8.75 minimum)
| 66.00/hr (16.50 minimum)
| 14.00/hr (3.50 minimum)
|
|
Oxford 100 ICP Dielectric
|
Tool usage |
55.00/hr (27.50 minimum)
| 184.00/hr (92.00 minimum)
| 184.00/hr (92.00 minimum)
| 352.00/hr (176.00 minimum)
| 55.00/hr (27.50 minimum)
|
|
Oxford 81 RIE
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
Oxford 82 RIE
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
Oxford ASP ALD
|
Tool usage |
75.00/hr (18.75 minimum)
| 275.00/hr (68.75 minimum)
| 275.00/hr (68.75 minimum)
| 550.00/hr (137.50 minimum)
| 75.00/hr (18.75 minimum)
|
|
Oxford Cobra ALE Quantum
|
Tool usage |
58.00/hr (14.50 minimum)
| 200.00/hr (50.00 minimum)
| 200.00/hr (50.00 minimum)
| 385.00/hr (96.25 minimum)
| 58.00/hr (14.50 minimum)
|
|
Oxford Cobra ICP Dielectric
|
Tool usage |
58.00/hr (14.50 minimum)
| 200.00/hr (50.00 minimum)
| 200.00/hr (50.00 minimum)
| 385.00/hr (96.25 minimum)
| 58.00/hr (14.50 minimum)
|
|
Oxford Cobra ICP Silicon
|
Tool usage |
55.00/hr (27.50 minimum)
| 184.00/hr (92.00 minimum)
| 184.00/hr (92.00 minimum)
| 352.00/hr (176.00 minimum)
| 55.00/hr (27.50 minimum)
|
|
Oxford FlexAL
|
Tool usage |
62.00/hr (31.00 minimum)
| 266.00/hr (133.00 minimum)
| 266.00/hr (133.00 minimum)
| 507.00/hr (253.50 minimum)
| 62.00/hr (31.00 minimum)
|
|
Oxford PECVD
|
Tool usage |
62.00/hr (31.00 minimum)
| 266.00/hr (133.00 minimum)
| 266.00/hr (133.00 minimum)
| 507.00/hr (253.50 minimum)
| 62.00/hr (31.00 minimum)
|
|
Parylene Coater #1
|
Tool usage |
14.00/hr (28.00 minimum)
| 35.00/hr (70.00 minimum)
| 35.00/hr (70.00 minimum)
| 66.00/hr (132.00 minimum)
| 14.00/hr (28.00 minimum)
|
|
Parylene Coater #2
|
Tool usage |
14.00/hr (28.00 minimum)
| 35.00/hr (70.00 minimum)
| 35.00/hr (70.00 minimum)
| 66.00/hr (132.00 minimum)
| 14.00/hr (28.00 minimum)
|
|
PDMS Casting Station - Rm 238
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
Pico MA FinePlacer FlipChip Bonder
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
Primaxx Vapor HF
|
Tool usage |
37.00/hr (27.75 minimum)
| 122.00/hr (91.50 minimum)
| 122.00/hr (91.50 minimum)
| 233.00/hr (174.75 minimum)
| 37.00/hr (27.75 minimum)
|
|
PT 720-740 RIE
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
PT 72 RIE
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
PT 770 ICP Etcher
|
Tool usage |
55.00/hr (27.50 minimum)
| 184.00/hr (92.00 minimum)
| 184.00/hr (92.00 minimum)
| 352.00/hr (176.00 minimum)
| 55.00/hr (27.50 minimum)
|
|
PT Singulator
|
Tool usage |
100.00/hr (25.00 minimum)
| 250.00/hr (62.50 minimum)
| 250.00/hr (62.50 minimum)
| 600.00/hr (150.00 minimum)
| 100.00/hr (25.00 minimum)
|
|
PT Takachi ALE
|
Tool usage |
58.00/hr (29.00 minimum)
| 201.00/hr (100.50 minimum)
| 201.00/hr (100.50 minimum)
| 385.00/hr (192.50 minimum)
| 58.00/hr (29.00 minimum)
|
|
PT Takachi HDP-CVD
|
Tool usage |
62.00/hr (31.00 minimum)
| 266.00/hr (133.00 minimum)
| 266.00/hr (133.00 minimum)
| 507.00/hr (253.50 minimum)
| 62.00/hr (31.00 minimum)
|
|
PT VLN Deep Silicon Etch
|
Tool usage |
77.00/hr (38.50 minimum)
| 306.00/hr (153.00 minimum)
| 306.00/hr (153.00 minimum)
| 584.00/hr (292.00 minimum)
| 77.00/hr (38.50 minimum)
|
|
RAD-2500m8 Wafer Mounter
|
Tool usage |
20.00/hr (5.00 minimum)
| 60.00/hr (15.00 minimum)
| 60.00/hr (15.00 minimum)
| 120.00/hr (30.00 minimum)
| 20.00/hr (5.00 minimum)
|
|
Rame-Hart 500 Goniometer
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
ReynoldsTech Au ECD Hood
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
ReynoldsTech Cu ECD Hood
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
ReynoldsTech KOH Hood
|
Tool usage |
7.00/hr (7.00 minimum)
| 7.00/hr (7.00 minimum)
| 7.00/hr (7.00 minimum)
| 12.00/hr (12.00 minimum)
| 7.00/hr (7.00 minimum)
|
|
ReynoldsTech Ni ECD Hood
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
SAMCO UV-1 UV Ozone
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
SC4500 Even-Hour Evaporator
|
Tool usage |
37.00/hr (55.50 minimum)
| 122.00/hr (183.00 minimum)
| 122.00/hr (183.00 minimum)
| 233.00/hr (349.50 minimum)
| 37.00/hr (55.50 minimum)
|
|
SC4500 Odd-Hour Evaporator
|
Tool usage |
37.00/hr (55.50 minimum)
| 122.00/hr (183.00 minimum)
| 122.00/hr (183.00 minimum)
| 233.00/hr (349.50 minimum)
| 37.00/hr (55.50 minimum)
|
|
Schott IR Inspector
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Suss Gamma Resist Cluster
|
Tool usage |
55.00/hr (13.75 minimum)
| 184.00/hr (46.00 minimum)
| 184.00/hr (46.00 minimum)
| 352.00/hr (88.00 minimum)
| 55.00/hr (13.75 minimum)
|
|
Suss MA6|BA6 Aligner
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
Suss MJB4 Aligner
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
Suss SB8e Substrate Bonder
|
Tool usage |
37.00/hr (37.00 minimum)
| 122.00/hr (122.00 minimum)
| 122.00/hr (122.00 minimum)
| 233.00/hr (233.00 minimum)
| 37.00/hr (37.00 minimum)
|
|
Terahertz Large-Signal Probe Station and Electronics
|
Tool usage |
130.00/hr (130.00 minimum)
| 400.00/hr (400.00 minimum)
| 400.00/hr (400.00 minimum)
| 800.00/hr (800.00 minimum)
| 130.00/hr (130.00 minimum)
|
|
Terahertz Small-Signal Probe Station
|
Tool usage |
250.00/hr (250.00 minimum)
| 650.00/hr (650.00 minimum)
| 650.00/hr (650.00 minimum)
| 1300.00/hr (1300.00 minimum)
| 250.00/hr (250.00 minimum)
|
|
Tousimis 915B CPD
|
Tool usage |
22.00/hr (22.00 minimum)
| 61.00/hr (61.00 minimum)
| 61.00/hr (61.00 minimum)
| 118.00/hr (118.00 minimum)
| 22.00/hr (22.00 minimum)
|
|
TPT HB16 Semi-automatic Wire Bonder
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Trion Minilock III ICP
|
Tool usage |
48.00/hr (24.00 minimum)
| 141.00/hr (70.50 minimum)
| 141.00/hr (70.50 minimum)
| 271.00/hr (135.50 minimum)
| 48.00/hr (24.00 minimum)
|
|
Unaxis 770 Deep Silicon Etch
|
Tool usage |
62.00/hr (31.00 minimum)
| 216.00/hr (108.00 minimum)
| 216.00/hr (108.00 minimum)
| 413.00/hr (206.50 minimum)
| 62.00/hr (31.00 minimum)
|
|
VCA Contact Angle
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Veeco Icon AFM
|
Tool usage |
48.00/hr (24.00 minimum)
| 141.00/hr (70.50 minimum)
| 141.00/hr (70.50 minimum)
| 271.00/hr (135.50 minimum)
| 48.00/hr (24.00 minimum)
|
|
Veeco Savannah ALD
|
Tool usage |
62.00/hr (31.00 minimum)
| 266.00/hr (133.00 minimum)
| 266.00/hr (133.00 minimum)
| 507.00/hr (253.50 minimum)
| 62.00/hr (31.00 minimum)
|
|
Versalaser Engraver | Cutter Tool
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
Westbond 7400A Ultrasonic Wire Bonder
|
Tool usage |
22.00/hr (5.50 minimum)
| 61.00/hr (15.25 minimum)
| 61.00/hr (15.25 minimum)
| 118.00/hr (29.50 minimum)
| 22.00/hr (5.50 minimum)
|
|
Woollam RC2 Spectroscopic Ellipsometer
|
Tool usage |
48.00/hr (12.00 minimum)
| 141.00/hr (35.25 minimum)
| 141.00/hr (35.25 minimum)
| 271.00/hr (67.75 minimum)
| 48.00/hr (12.00 minimum)
|
|
Woollam WVASE Spectroscopic Ellipsometer
|
Tool usage |
48.00/hr (12.00 minimum)
| 141.00/hr (35.25 minimum)
| 141.00/hr (35.25 minimum)
| 271.00/hr (67.75 minimum)
| 48.00/hr (12.00 minimum)
|
|
Xactix Xenon Difluoride
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
Xallent SAKYIWA NanoProber
|
Tool usage |
23.00/hr (5.75 minimum)
| 66.00/hr (16.50 minimum)
| 66.00/hr (16.50 minimum)
| 129.00/hr (32.25 minimum)
| 23.00/hr (5.75 minimum)
|
|
Xenon Difluoride SPTS
|
Tool usage |
37.00/hr (18.50 minimum)
| 122.00/hr (61.00 minimum)
| 122.00/hr (61.00 minimum)
| 233.00/hr (116.50 minimum)
| 37.00/hr (18.50 minimum)
|
|
YES Asher
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
YES EcoClean Asher
|
Tool usage |
37.00/hr (9.25 minimum)
| 122.00/hr (30.50 minimum)
| 122.00/hr (30.50 minimum)
| 233.00/hr (58.25 minimum)
| 37.00/hr (9.25 minimum)
|
|
YES HMDS Oven
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
YES NH3 Reversal Oven
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|
|
YES PB8 Bake Oven
|
Tool usage |
14.00/hr (14.00 minimum)
| 35.00/hr (35.00 minimum)
| 35.00/hr (35.00 minimum)
| 66.00/hr (66.00 minimum)
| 14.00/hr (14.00 minimum)
|
|
YES Polyimide Oven
|
Tool usage |
14.00/hr
| 35.00/hr
| 35.00/hr
| 66.00/hr
| 14.00/hr
|
|
Zeiss Gemini SEM
|
Tool usage |
75.00/hr (18.75 minimum)
| 253.00/hr (63.25 minimum)
| 253.00/hr (63.25 minimum)
| 484.00/hr (121.00 minimum)
| 75.00/hr (18.75 minimum)
|
|
Zeiss Supra SEM
|
Tool usage |
62.00/hr (15.50 minimum)
| 153.00/hr (38.25 minimum)
| 153.00/hr (38.25 minimum)
| 292.00/hr (73.00 minimum)
| 62.00/hr (15.50 minimum)
|
|
Zeiss Ultra SEM
|
Tool usage |
62.00/hr (15.50 minimum)
| 216.00/hr (54.00 minimum)
| 216.00/hr (54.00 minimum)
| 413.00/hr (103.25 minimum)
| 62.00/hr (15.50 minimum)
|
|
Zygo Optical Profilometer
|
Tool usage |
48.00/hr (12.00 minimum)
| 141.00/hr (35.25 minimum)
| 141.00/hr (35.25 minimum)
| 271.00/hr (67.75 minimum)
| 48.00/hr (12.00 minimum)
|
|
Zyvex Nanoprobes for Ultra SEM
|
Tool usage |
22.00/hr (11.00 minimum)
| 61.00/hr (30.50 minimum)
| 61.00/hr (30.50 minimum)
| 118.00/hr (59.00 minimum)
| 22.00/hr (11.00 minimum)
|